MEMS: A Practical Guide of Design, Analysis, and Applications

MEMS: A Practical Guide of Design, Analysis, and Applications

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A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS).


Title:MEMS: A Practical Guide of Design, Analysis, and Applications
Author: Jan Korvink, Oliver Paul
Publisher:Springer Science & Business Media - 2010-05-28
ISBN-13:

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